1. Total chamber volume of reactor was 9210 cm 3 , and base pressure was maintained lower than 0.1 Torr. Characterization of thin films: To obtain FT-IR spectra of pCHA, pCV1, pCV2, and pV3D3, ALPHA FT-IR spectrometer (Bruker Optics, USA) was used in absorbance mode. XPS (K-Alpha, ThermoFisher Scientific) measurement was performed to obtain high resolution Si2p spectra and the atomic percentage of the polymer films. To calculate CTE of the polymer thin films, the thickness of the polymer deposited on Si wafer was measured in situ using a spectroscopic ellipsometer;The density of REFERENCES
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