Analysis of the Impact of Post-Process Modifications on the Properties of Tio2 Thin Films with High-Temperature Stable Anatase Phase Deposited by the Electron Beam Evaporation Method

Author:

Obstarczyk Agata,Mańkowska Ewa,Weichbrodt Wiktoria,Kapuścik Paulina,Kijaszek Wojciech,Mazur Michał

Publisher

Elsevier BV

Reference53 articles.

1. Effect of thermal annealing on structural and electrical properties of TiO 2 thin films;R M Nagabharana;Thin Solid Films,2020

2. Carbon nanotube and metal oxide hybrid materials for gas sensing;T Kerdcharoen;Semiconduct. Gas Sens,2013

3. Study of the effect of annealing temperature on the structure, morphology, and photocatalytic activity of Si-doped TiO 2 thin films deposited by electron beam evaporation;Z Lu;Appl. Surf. Sci,2011

4. Deposition and characterization of silicon thin film on stainless steel by electron beam evaporation;S H Lee;Thin Solid Films,2022

5. Anatase TiO 2 deposited at low temperature by pulsing an electron cyclotron wave resonance plasma source;B Dey;Sci. Rep,2020

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