Highly Oriented Crystalline Si on Epitaxial Gd2o3/Si(111) Substrate Using Low-Cost Rf Sputtering for Silicon on Insulator Application

Author:

Patil Shubham,Kumar Sandeep,Pandey Adityanarayan H.,Bhunia Swagata,Kamaliya Bhaveshkumar,Sharma Anand,Lashkare Sandip,Mote Rakesh G.,Laha Apurba,Deshpande Veeresh,Ganguly Udayan

Publisher

Elsevier BV

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