Quasi-Area-Scan Chromatic Confocal Microscopy for Full-Field Surface Profilometry with Sub-Micrometer Accuracy-Reference-Cited by-同舟云学术

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Quasi-Area-Scan Chromatic Confocal Microscopy for Full-Field Surface Profilometry with Sub-Micrometer Accuracy

Published:2022 Issue: Volume: Page:
ISSN:1556-5068
Container-title:SSRN Electronic Journal
language:en
Short-container-title:SSRN Journal

Author:

Chen Hong-Ruei,Chen Liang-Chia

Publisher

Elsevier BV

Subject

General Earth and Planetary Sciences,General Environmental Science

Reference33 articles.

1. A scanning slit optical microscope;D M Maurice;Investigative Ophthalmology & Visual Science,1974

2. Tandem-scanning reflected-light microscope;M Petr�?;JOSA,1968

3. Real-time confocal scanning optical microscope;G Xiao;Applied Physics Letters,1988

4. Chromatic confocal displacement sensor with optimized dispersion probe and modified centroid peak extraction algorithm;J Bai;Sensors,2019

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