Nonlinear Effects of Pulsed Ion Beam in Ultra-High Resolution Sputtering Material Removal

Author:

Xie Lingbo,Tian Ye,Shi Feng,Song Ci,Tie Guipeng,Zhou Gang,Shao Jianda,Liu Shijie

Publisher

Elsevier BV

Subject

General Earth and Planetary Sciences,General Environmental Science

Reference29 articles.

1. Effect of pulsed ion-beam treatment on the electronic and optical properties of GaN epitaxial films on sapphire;D A Zatsepin;Applied Surface Science,2022

2. A new mechanism of surface phase formation on precipitation-hardening alloy under ion irradiation;Q Zhou;Applied Surface Science,2021

3. Towards atomic and close-to-atomic scale manufacturing;F Fang;International Journal of Extreme Manufacturing,2019

4. Neon and helium focused ion beam etching of resist patterns;D Xia;Nanotechnology,2020

5. High-fidelity fabrication of plasmonic nanoholes array via ion-beam planarization for extraordinary transmission applications;Q Liu;Applied Surface Science,2020

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