Defocus Detection System Based on Bevel-Axial Method with Projected Stripe Pattern

Author:

Gao Tianyu,Wei Jingsong,Xu Xiaozhong,Huang Zhihong,Xue Yalong,Wei Wei,Liu Yongjun

Publisher

Elsevier BV

Reference17 articles.

1. Image lithography in telluride suboxide thin film through controlling 'virtual' bandgap;T Wei;Photon. Res,2017

2. Methods of improving the accuracy of operation of an autofocus in a circular laser writing system;D E Denk;Optoelectron.Instrument.Proc,2010

3. Auto-focusing with multi focus color image fusion based on curvelet transform on microscopic imaging;H Dogan;2015 9th International Conference on Electrical and Electronics Engineering (ELECO),2015

4. Focusing error detection based on astigmatic method with a double cylindrical lens group;Z Bai;Optics & Laser Technology,2018

5. Realization and performance evaluation of high speed autofocusing for direct laser lithography;H.-G Rhee;Review of Scientific Instruments,2009

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