Author:
Asif Muhammad H.,Graczyk Mariusz,Heidari Babak,Maximov Ivan
Subject
General Earth and Planetary Sciences,General Environmental Science
Reference19 articles.
1. Imprint of sub-25 nm vias and trenches in polymers;S Y Chou;Appl. Phys. Lett,1995
2. Large scale nanolithography using nanoimprint lithography;B Heidari;J. Vac. Sci. Technol., B: Microelectron. Process. Phenom,1999
3. Nanoimprint lithography at the 6 in. wafer scale;B Heidari;J. Vac. Sci. Technol. B,2000
4. Nanoimprint lithography: an alternative nanofabrication approach;Sotomayor Torres;Mater. Sci. Eng. C,2003
5. Nanoimprint lithography: An old story in modern times?;H Schift;A review J. Vac. Sci. Technol. B,2008