Amidoxime-Containing Zr and Hf Precursors for Thin Film Deposition
Author:
Chung Taek-Mo,Lee Ga Yeon,Park Chanwoo
Reference40 articles.
1. Comparing the bite angles of the chelating groups with those of other hafnium complexes, the bite angles of complex 2 are comparable to those of Hf;�;O t Bu)