Effects of Surface Treatments for the Adhesion Improvement between Cu and Sicn in Beol Interconnect

Author:

Kim Dong Jun,Kang Sumin,Lee Sun Woo,Lee Inhwa,Park Seungju,Lee Jihyun,Kim Joong Jung,Kim TaekSoo

Publisher

Elsevier BV

Reference34 articles.

1. Reliability Challenges of Through-Silicon-Via (TSV) Stacked Memory Chips for 3-D Integration: From Transistors to Packages;H.-Y Son;IEEE International Interconnect Technology Conference,2013

2. A Study of Properties which the Diffusion Barrier Ta and IMD (Inter-Metal Dielectric) Meterial SiOCH for Cu Ion Diffusion;J W Kim;Proceedings of the KIEE Conference,2004

3. Invasion Percolation Model for Abnormal TDDB Characteristic of ULK Dielectrics with Cu Internconnect at Advanced Technology Nodes;F Chen;International Reliability Physics Symposium,2011

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