Experimental investigation by atomic force microscopy on mechanical and tribological properties of thin films

Abstract

Abstract For this paper, a two part approach was taken to develop a fundamental understanding of the surface properties of four different hard thin films. On one front, atomic force microscopy was used to quantitatively measure both the adhesion and friction forces between the tip and sample surfaces. On the other front, the indentation technique was used to determine the mechanical properties of these materials (Young's modulus and hardness). The main purpose of this study was to investigate different thin films deposited on silicon wafer substrate for improving the wear life and reducing the coefficient of friction. Nanomechanical and nanotribological characterization of thin films of chromium, nickel, platinum and titanium deposited on silicon were performed.