Affiliation:
1. Warsaw University of Technology, Institute of Micromechanics and Photonics, Warsaw, Poland
Abstract
Abstract
The stiffness is a fundamental qualifier of elastically deformable mechanical microcomponents and micromechanisms whose static, modal or dynamic responses need to be evaluated. This paper presents the results of theoretical studies of microcantilevers and microbridges and also a method for experimental stiffness testing using atomic force microscopy. Castigliano's displacement theorem is used herein to derive the stiffness equations. The results of the theoretical and experimental studies are compared and discussed.
Subject
Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics
Cited by
6 articles.
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