Morphological study of SiC coating developed on 2D carbon composites using MTS precursor in a hot-wall vertical reactor

Author:

Venugopalan Ramani1,Prakash Jyoti1,Nuwad Jitendra2,Pillai Chirakarumpil Gopalan Sivan2,Tyagi Avesh Kumar2,Dakshinamoorthy Sathiyamoorthy1

Affiliation:

1. a Powder Metallurgy Division, Bhabha Atomic Research Centre, Mumbai, India.

2. b Chemistry Division, Bhabha Atomic Research Centre, Mumbai, India.

Abstract

AbstractSilicon carbide coating was developed using chemical vapor deposition on carbon substrate as a protective coating. The present studies were carried out with methyl trichlorosilane as the SiC precursor, at 1673 K along with hydrogen and argon as carrier gas using a high-temperature vertical graphite reactor. The SiC coatings were characterized by means of X-ray diffraction for phase identification. Scanning electron microscopy analysis with energy dispersive X-ray spectrometer was also carried out for microstructure and elemental analysis. From the morphological study of different SiC deposits obtained at varying operating parameters it was observed that methyl trichlorosilane feed rate and hydrogen flow rate play a major role in deciding the nature of deposits and the argon percentage in the mixed gas also plays a vital role.

Publisher

Walter de Gruyter GmbH

Subject

Materials Chemistry,Metals and Alloys,Physical and Theoretical Chemistry,Condensed Matter Physics

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