Affiliation:
1. Gemeinschaftslabor für Elektronenmikroskopie der RWTH-Aachen, Ahornstraße 55, D-52074 Aachen
Subject
Metals and Alloys,Mechanics of Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
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3. Low-Ion-Dose FIB Modification of Monomicellar Layers for the Creation of Highly Ordered Metal Nanodot Arrays
4. Fabrication of 12 nm electrically variable shallow junction metal-oxide-semiconductor field effect transistors on silicon on insulator substrates,2003