Low-g Area-changed MEMS Accelerometer Using Bulk Silicon Technique-Reference-Cited by-同舟云学术

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Low-g Area-changed MEMS Accelerometer Using Bulk Silicon Technique

Published:2008-06-01 Issue:6 Volume:5 Page:626-632
ISSN:1546-9239
Container-title:American Journal of Applied Sciences
language:
Short-container-title:American J. of Applied Sciences

Author:

Bais Badariah,Majlis Burhanuddin Yeop

Publisher

Science Publications

Subject

Multidisciplinary

Link

http://thescipub.com/PDF/ajassp.2008.626.632.pdf

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An experimentation of hand–arm tremor control using low-g area-changed capacitive micro-accelerometer;Transactions of the Institute of Measurement and Control;2024-07-25

2. Study on the influence of manufacturing tolerance of the spring beam on the sensitivity of the two-axis MEMS accelerometer;International Journal on Interactive Design and Manufacturing (IJIDeM);2024-07-14

3. SOI structure employed area dependant capacitive MEMS accelerometer with novel C–V converter;Microsystem Technologies;2022-04-03

4. A new improved vertical comb type differential capacitive sensing micro accelerometer using silicon-on-insulator wafer technology;Journal of Micromechanics and Microengineering;2020-07-14

5. Superior performance area changing capacitive MEMS accelerometer employing additional lateral springs for low frequency applications;Microsystem Technologies;2020-02-12

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