Affiliation:
1. University of Heidelberg, Germany
2. ICIQ, Spain
Abstract
Materials possessing interesting properties for current and future everyday products always have a valuable place in the scientific research. Accordingly, semiconductor materials are the foundation of modern electronics. In most of the applications, metal oxide based semiconductors are at present generally useful in the form of thin films. Metal–alkoxo complexes constitute a very important group of precursors for oxide materials. The most common chemical approaches are well described in the literature and the most relevant pathways will be summarized later in this chapter.