Preparation and Characterization of TiO2 Thin Films on Silica Gel Powders by Plasma Enhanced Chemical Vapor Deposition in a Circulating Fluidized Bed Reactor
Author:
Affiliation:
1. Department of Chemical and Biomolecular Engineering, Energy and Environment Research Center, Korea Advanced Institute of Science and Technology
2. Department of Cosmetics & Chemical Engineering, Woosuk University
Publisher
Society of Chemical Engineers, Japan
Subject
General Chemical Engineering,General Chemistry
Link
http://www.jstage.jst.go.jp/article/jcej/41/7/41_07WE109/_pdf
Reference18 articles.
1. Plasma Enhanced Chemical Vapor Deposition on Powders in a Low Temperature Plasma Fluidized Bed
2. Frenck, H. J., W. Kulisch, M. Kuhr and R. Kassing; “Deposition of TiO2 Thin Films by Plasma Enhanced Decomposition of Tetra-Isopropyltitanate,” Thin Solid Film, 201, 327–335 (1991)
3. Fujishima, A., K. Hashimoto and T. Watanabe; TiO2 Photocatalysis. p. 124, BKC, Toyko, Japan (1999)
4. Grace, J. R. and H. Bi eds.; Circulating Fluidized Beds, pp. 1–20, Blackie Academic and Professional, London, U.K. (1997)
5. Guillard, C., D. Debayle, A. Gagnaire, H. Jaffrezic and J. M. Herrmann; “Physical Properties and Photocatalytic Efficiencies of TiO2 Films Prepared by PECVD and Sol–Gel Methods,” Mat. Res. Bull., 39, 1445–1458 (2004)
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