Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

Author:

Burmeister Frank,Steenhusen Sönke,Houbertz Ruth,Zeitner Uwe D.,Nolte Stefan,Tünnermann Andreas

Publisher

Laser Institute of America

Subject

Instrumentation,Biomedical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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