1. Key Laboratory of CNC Equipment Reliability, Ministry of Education, School of Mechanical and Aerospace Engineering, Jilin University 1 , Changchun, Jilin 130022, China
2. Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences 2 , Changchun 130033, China
3. Department of Mechanical Engineering, Faculty of Science and Technology, Keio University 3 , Yokohama 223-8522, Japan