Research on 355 nm all-solid-state ultraviolet laser processing through silicon holes-Reference-Cited by-同舟云学术

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Research on 355 nm all-solid-state ultraviolet laser processing through silicon holes

Published:2019-05 Issue:2 Volume:31 Page:022003
ISSN:1042-346X
Container-title:Journal of Laser Applications
language:en
Short-container-title:Journal of Laser Applications

Author:

Liang Ting¹²,Li Qisi¹²^ORCID,Lei Cheng¹²,Li Wangwang¹²,Li Yongwei¹²,Lin Lina¹²,Yang Jiaoyan¹²,Wang Wentao¹²,Li Zhiqiang¹²,Chen Guidong¹²,Xiong Jijun¹²

Affiliation:

1. Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education, Taiyuan, Shanxi 030051, China

2. Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, Shanxi 030051, China

Funder

Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi

Shanxi Natural Science Foundation

the Fund for Shanxi '1331 Project' Key Subject Construction

China National Funds for Distinguished Young Scientists

Publisher

Laser Institute of America

Subject

Instrumentation,Biomedical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://lia.scitation.org/doi/pdf/10.2351/1.5066428

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 355 nm全固态紫外纳秒激光加工蓝宝石通孔研究;Chinese Journal of Lasers;2023

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