1. Fraunhofer Institute for Laser Technology ILT 1 , Steinbachstraße 15, Aachen 52074, Germany
2. Chair for Laser Technology LLT, RWTH Aachen University 2 , Steinbachstraße 15, Aachen 52074, Germany
3. 4D Photonics GmbH 3 , Burgwedeler Str. 27a, Isernhagen 30916, Germany
4. Institute of Materials Physics, Helmholtz-Zentrum Hereon 4 , Max-Planck-Str.1, Geesthacht 21502, Germany