Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber-Reference-Cited by-同舟云学术

Surface micromachining on a polymethylmethacrylate substrate using visible laser-induced backside wet etching with a KMnO4 solution as an absorber

Author:

Chang Hui-Fang¹^ORCID,Yeung Wing Kiu¹,Kao Wei-Chen¹^ORCID,Ehrhardt Martin²,Zimmer Klaus²^ORCID,Cheng Ji-Yen¹³⁴⁵⁶^ORCID

Affiliation:

1. Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan

2. Leibniz Institute of Surface Engineering (IOM), Permoserstraße 15, 04318 Leipzig, Germany

3. Institute of Biophotonics, National Yang-Ming University, Taipei 11221, Taiwan

4. Biophotonics and Molecular Imaging Research Center (BMIRC), National Yang-Ming University, Taipei 11221, Taiwan

5. Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan

6. College of Engineering, Chang Gung University, Taoyuan 33302, Taiwan

Funder

Ministry of Science and Technology, Taiwan

Publisher

Laser Institute of America

Subject

Instrumentation,Biomedical Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

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