1. Institute for Applied Materials-Applied Materials Physics, Karlsruhe Institute of Technology, P.O. Box 3640, 76021 Karlsruhe, Germany
2. Department of Mechanical Engineering, Technical University of Denmark, Building 425, 2800 Lyngby, Denmark
3. Institute for Micro Process Engineering, Karlsruhe Institute of Technology, P.O. Box 3640, 76021 Karlsruhe, Germany
4. Institute of Functional Interfaces, Karlsruhe Institute of Technology, P.O. Box 3640, 76021 Karlsruhe, Germany
5. Karlsruhe Nano Micro Facility, H.-von-Helmholtz-Platz 1, 76344 Egg.-Leopoldshafen, Germany