Low-pressure bonding of monolithic SU-8 microfluidic devices
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/aae322/pdf
Reference45 articles.
1. Direct laser writing of three-dimensional photonic-crystal templates for telecommunications
2. SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography
3. Single-photon-multi-layer-interference lithography for high-aspect-ratio and three-dimensional SU-8 micro-/nanostructures
4. Tunable high aspect ratio polymer nanostructures for cell interfaces
5. SU-8 as a material for lab-on-a-chip-based mass spectrometry
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