Abstract
Abstract
We report on a piezoelectric micromachined ultrasonic transducer (PMUT) driven in a nonlinear regime, generating chaotic amplitude modulated ultrasonic waves. At large enough drives, the PMUT enters in the Duffing regime which opens a hysteresis with two available states. By modulating the frequency of the driving signal, the system may switch between both states, and selecting the appropriate modulation frequency enables to enter in the chaotic regime. The chaos is then imprinted as a modulation of the PMUT’s amplitude. We characterize this regime in the three accessible domains: electrical, mechanical and acoustic, and demonstrate they are fully correlated. We then focus on the generated acoustic signals and demonstrate that the chaotic modulation propagates according to the PMUT’s linear regime. Remarkably, the detected acoustic waves are strongly correlated to the on-chip piezoelectric measurements, regardless of the acoustic beam profile. The frequency spectrum of the chaotic modulation spreads around the ultrasonic carrier, mimicking a noise modulated carrier signal. We exploit this property for jamming applications where the chaotic PMUT is used to mask surrounding acoustic waves. Unlike most jamming applications, our approach does not require driving signals with a broad frequency spectrum, the noisy pattern arising directly from the structure’s dynamics. Using two PMUTs, one in the linear and the other in the nonlinear regime, we realize a proof-of-concept where the ultrasound generated by the first PMUT is drowned out by the chaotic PMUT signal. We demonstrate that the carrier frequency of the jamming PMUT does not need to match perfectly the one of the linear PMUT. This chaos generation is generic and could be adapted to any PMUT, and thanks to the rich frequency spectrum of the chaotic modulation, the frequency of the signal to jam does not need to be precisely known.
Funder
INS2I - CNRS grant, project BatCipher
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Silicon micromachined high-shock accelerometers with a curved-surface-application structure for over-range stop protection and free-mode-resonance depression;Dong;J. Micromech. Microeng.,2002
2. Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching;Ahn,2013
3. A MEMS condenser microphone for consumer applications;Weigold,2006
4. RF MEMS switches and switch circuits;Rebeiz;IEEE Microwave Magazine,2001
5. An ultrasonic rangefinder based on an AlN piezoelectric micromachined ultrasound transducer;Przybyla,2010
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献