New insight into contradictive relationship between sensitivity and working bandwidth of cilium MEMS bionic vector hydrophone-Reference-Cited by-同舟云学术

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New insight into contradictive relationship between sensitivity and working bandwidth of cilium MEMS bionic vector hydrophone

Published:2019-09-23 Issue:11 Volume:29 Page:115016
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Xu Qingda^ORCID,Zhang Guojun,Zhao Yujie,Wang Renxin^ORCID,Ding Junwen,Zhang Xiaoyong,Xue Chenyang^ORCID,Zhang Wendong

Funder

The Fund for Shanxi ‘1331 Project’ Key Subject Construction

Major State Basic Research Development Program of China

Shanxi Province Applied Basic Research Project

National Science Foundation for Distinguished Young Scholars of China

National High Technology Research and Development (863) Program of China

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/1361-6439/ab3ece/pdf

Reference30 articles.

1. Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone

2. Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

3. Design and Characterization of Artificial Haircell Sensor for Flow Sensing With Ultrahigh Velocity and Angular Sensitivity

4. Stress-driven AlN cantilever-based flow sensor for fish lateral line system

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In Situ Observing Ciliary Biomimetic Three-Dimensional Vector Hydrophone;IEEE Sensors Journal;2024-04-01

2. A multi-objective optimization of sensitivity and bandwidth of a 3-D MEMS bionic vector hydrophone;Analog Integrated Circuits and Signal Processing;2022-01-20

3. Design and Simulation of Flexible Underwater Acoustic Sensor Based on 3D Buckling Structure;Micromachines;2021-12-10

4. Hydrophones, fundamental features, design considerations, and various structures: A review;Sensors and Actuators A: Physical;2021-10

5. A Mathematical Model of a Piezoelectric Micro- Machined Hydrophone With Simulation and Experimental Validation;IEEE Sensors Journal;2021-06-15

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