Fast analytical model of MZI micro-opto-mechanical pressure sensor
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/aab461/pdf
Reference15 articles.
1. Integrated Optical and Electronic Pressure Sensor
2. Design of a Pressure Sensor Based on Optical Fiber Bragg Grating Lateral Deformation
3. Optical Fiber Fabry–Pérot Pressure Sensor Based on a Polymer Structure
4. Guided Wave Optical MEMS Pressure Sensor
5. Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor
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