Passive communication for low power distributed sensors using MEMS optical cavities

Abstract

Abstract Distributed sensing has been of great interest in recent research. Distributed sensors are in part defined by the methods they use to communicate. We demonstrate a new low power method of optical communication. Instead of communicating optically by generating new light to communicate using a light emitting diode or laser, our method uses optical interference to vary the reflectivity of a micro-electromechanical systems (MEMS) optical cavity. A thin air gap between an adjustable MEMS mirror made on a silicon on insulator die and glass encapsulation generates optical interference. By moving the mirror electrostatically, the reflected light intensity is modulated, and signals are transmitted passively. The transmitted signal is measured by observing the reflected light intensity with a photodiode. We demonstrate the use of fiber optic cables to deliver illumination and collect reflected light with modulated intensity. We propose that these devices may also be used in series arrays where reflected light from one optical cavity can be used as illumination for another.