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Effect of surface asperities on the capacitances of capacitive RF MEMS switches

  • Published:2017-02-15 Issue:3 Volume:27 Page:034002
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Chen Zhiqiang,Tian Wenchao,Zhang Xiaotong

Funder

The Natural Science Foundation of Ningbo city of China

The extension of the National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molecular dynamics simulations and analyzation of Cu deposited on stainless steel substrate surfaces;Surface Topography: Metrology and Properties;2024-07-01

2. Electrostatic levitation: an elegant method to control MEMS switching operation;Nonlinear Dynamics;2021-05-12

3. Stress-dependent electrical impedance behaviours at fractal rough interfaces;Surface Topography: Metrology and Properties;2021-04-28

4. Effect of the Different Substrates and the Film Thickness on the Surface Roughness of Step Structure;2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2021-04-25

5. A novel switch beam design method with extending switching radio-frequency bandwidth;Microsystem Technologies;2020-07-17
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