Abstract
Abstract
We present a novel compact electric permittivity sensor that exploits Bleustein–Gulyaev waves propagating along the surface of shear-poled piezoelectrics. We formulate the dynamic nonlinear electromechanical partial differential equations of motion governing wave propagation under electromagnetically quasistatic conditions. The permittivity of the medium-under-test was found to influence the sensor eigenvalues, enabling the implementation of a frequency-shift permittivity sensor. Solution of the equations of motion demonstrates resonance of the first and third modes when excited using an interdigitated transducer. We fabricated two sensor prototypes on shear-poled PZT4 and LiNbO3 substrates and used a Vector Network Analyzer to observe the shift in their fundamental natural frequency in the presence of various media-under-test. S
11 measurements show deterministic and repeatable shifts in the resonant frequency of the first mode of the LiNbO3 sensor measured at
Δ
f
1
=
3.51
MHz for ethanol and
Δ
f
1
=
7.49
MHz for deionized water where the bare surface frequency was initially at
f
1
=
25.27
MHz.
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献