Investigations on piezo actuated micro XY stage for vibration-assisted micro milling

Abstract

Abstract Vibration assisted machining is an advanced non-conventional precision machining technique aiming at improving the machining performance by superimposing a small amplitude, high-frequency vibration either on the tool or on the workpiece. This article presents the mechanical design, electromechanical simulation, and experimentation on the developed prototype of the flexural hinged micro XY stage for the vibration-assisted micro-milling system. The micro XY stage comprises three layers of flexural hinge structure surrounding the central parallel kinematic structure. The finite element analysis method is adopted to evaluate the static structural stiffness and harmonic behaviour. Two multilayer piezoelectric stack actuators drive the micro XY stage in X and Y directions. The experimental results show that the micro XY stage has a vibrating work area of 17.06 µm × 17.11 µm with a hysteresis nonlinearity and cross-coupling displacements on both axes. Therefore, an electromechanical model is essential to compensate for the hysteresis behaviour and cross-coupling displacements. Open-loop tracking control experiments determine the accuracy of the developed electromechanical model. Implementing a combined hysteresis and cross-coupling displacement compensation approach into the electromechanical model resulted in an open-loop tracking error of 7% for the synchronised circular path and a maximum deviation of 0.6 µm from the linear path.