Design, fabrication and characterization of RF MEMS shunt switch for wideband operation of 3 GHz to 30 GHz
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/ab3fba/pdf
Reference17 articles.
1. RF MEMS switches and switch circuits
2. Study of the Effect of Surface Roughness on the Performance of RF MEMS Capacitive Switches Through 3-D Geometric Modeling
3. MEMS reliability from a failure mechanisms perspective
4. Digital-type RF MEMS switched capacitors
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3. Analytical model and analysis of RF MEMS switch for Ka-band applications;Microsystem Technologies;2023-12-28
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