Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors-Reference-Cited by-同舟云学术

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Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors

Published:2020-03-02 Issue:4 Volume:30 Page:045010
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zheng Xudong,Wu Haibin^ORCID,Lin Yiyu^ORCID,Ma Zhipeng,Jin Zhonghe

Funder

Natural Science Foundation of Zhejiang Province

China National Funds for Distinguished Young Scientists

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1088/1361-6439/ab71e7/pdf

Reference50 articles.

1. Micromachined inertial sensors

2. Type I and Type II Micromachined Vibratory Gyroscopes

3. High Quality Factor Mode Ordered Dual Foucault Pendulum Gyroscope

4. Thru-Wafer Interconnects for Double-Sided (TWIDS) fabrication of MEMS

5. An Interface ASIC for MEMS Vibratory Gyroscopes With a Power of 1.6 mW, 92 dB DR and 0.007°/s/ $\sqrt {\rm {Hz}} $ Noise Floor Over a 40 Hz Band

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1. Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout;Journal of Micromechanics and Microengineering;2023-07-27

2. Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation;Journal of Micromechanics and Microengineering;2023-03-17

3. Influence of angular acceleration on the dynamic response of the proof mass in the MEMS vibratory gyroscope model;Journal of the Brazilian Society of Mechanical Sciences and Engineering;2022-12-24

4. A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope;IEEE Sensors Journal;2022-10-15

5. Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance;Journal of Micromechanics and Microengineering;2022-03-07

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