Nonlinear dynamic modeling of a V-shaped metal based thermally driven MEMS actuator for RF switches-Reference-Cited by-同舟云学术

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Nonlinear dynamic modeling of a V-shaped metal based thermally driven MEMS actuator for RF switches

Published:2018-03-13 Issue:5 Volume:28 Page:054004
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Bakri-Kassem Maher^ORCID,Dhaouadi Rached,Arabi Mohamed,Estahbanati Shahabeddin V,Abdel-Rahman Eihab^ORCID

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/1361-6439/aaafb2/pdf

Reference20 articles.

1. Thermally Actuated Latching RF MEMS Switch and Its Characteristics

2. Thermally-actuated latching RF MEMS switch

3. High Power Latching RF MEMS Switches

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1. Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors;Journal of Microelectromechanical Systems;2024-04

2. Nonlinear electromagnetic force analysis and compensation control of electromagnetic linear actuator;Physica Scripta;2023-09-06

3. A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam;Sensors and Actuators A: Physical;2021-09

4. Dynamics of V-Shaped Electrothermal MEMS-Based Resonators;Journal of Microelectromechanical Systems;2020-10

5. A unified model for electrostatic sensors in fluid media;Nonlinear Dynamics;2020-07

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