Comparison of Al and Cu masks used for patterning boron-doped diamonds in oxygen plasma
Author:
Funder
Vedecká Grantová Agentúra MŠVVaŠ SR a SAV
Agentúra na Podporu Výskumu a Vývoja
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/ab4d6f/pdf
Reference33 articles.
1. Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS duringin situtribotests
2. Hemispherical wineglass resonators fabricated from the microcrystalline diamond
3. A MEMS diamond hemispherical resonator
4. Nanodiamond resonators fabricated on 8″ Si substrates using adhesive wafer bonding
5. High Q diamond hemispherical resonators: fabrication and energy loss mechanisms
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