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Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

  • Published:2018-01-09 Issue:2 Volume:28 Page:025013
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Tong HaoORCID,Li Yong,Zhang Long

Funder

2016 Annual Cultivation and Development Project for Scientific and Technological Innovation Base

State Scholarship Fund of China

Independent Research Project of State Key Laboratory of Tribology of China

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Selective laser melting of 3D queue microelectrodes and its application in micro-EDM;The International Journal of Advanced Manufacturing Technology;2024-08-05

2. Micro ECDM scanning process with feedback control of flexible contact force;Journal of Manufacturing Processes;2023-05

3. Real-time data acquisition and discharge pulse analysis in controlled RC circuit based Micro-EDM;Microsystem Technologies;2023-02-22

4. Array SS-3D Micro EDM by Using Array Tool Electrodes;Servo Scanning 3D Micro Electro Discharge Machining;2022-06-22

5. A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding;International Journal of Extreme Manufacturing;2021-07-19
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