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Design and fabrication of a silicon-based MEMS acceleration switch working lower than 10 g

  • Published:2017-05-08 Issue:6 Volume:27 Page:065009
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Hwang Jeongki,Ryu Daeho,Park Chihyun,Jang Seung-gyo,Lee Chung-il,Kim Yong-Kweon

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Research Progress of MEMS Inertial Switches;Micromachines;2022-02-24

3. A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil;Journal of Micromechanics and Microengineering;2022-02-14

4. Design, modeling, and testing of a bidirectional multi-threshold MEMS inertial switch;Sensors and Actuators A: Physical;2022-02

5. Design and Performance Analysis of Lateral Type MEMS Inertial Switch;Journal of the Korean Society for Aeronautical & Space Sciences;2020-07-31
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