Fabrication of spherical microlens array by combining lapping on silicon wafer and rapid surface molding-Reference-Cited by-同舟云学术

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Fabrication of spherical microlens array by combining lapping on silicon wafer and rapid surface molding

Published:2018-04-17 Issue:7 Volume:28 Page:075008
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Liu Xiaohua,Zhou Tianfeng^ORCID,Zhang Lin,Zhou Wenchen,Yu Jianfeng,Lee L James,Yi Allen Y^ORCID

Funder

National Key Basic Research Program of China

Division of Civil, Mechanical and Manufacturing Innovation

Division of Industrial Innovation and Partnerships

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/1361-6439/aab995/pdf

Reference32 articles.

1. Fabrication, characterization, and applications of microlenses

2. Recent advancements in optical microstructure fabrication through glass molding process

3. Design and fabrication of a microlens array by use of a slow tool servo

4. Design, fabrication, and testing of a Shack–Hartmann sensor with an automatic registration feature

5. Design and fabrication of a micro Alvarez lens array with a variable focal length

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1. Template-Oriented-Assembly microsphere lithography for multi-type SiC microlens arrays;Applied Surface Science;2024-11

2. Effect of temperature on the ductile-to-brittle transition in laser-assisted mechanical ruling of silicon;Materials Science in Semiconductor Processing;2024-03

3. Rapid fabrication of microfluidic mixer chip by non-isothermal molding method based on resistance heating principle and its application in pesticide residue detection;Journal of Micromechanics and Microengineering;2022-09-29

4. Analysis of Rapid Heating Performance in Multi-Layered Injection Mold System for CNT Surface Heating Element Application;Journal of the Korean Society for Precision Engineering;2022-07-01

5. A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding;International Journal of Extreme Manufacturing;2021-07-19

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