Author:
Usami A,Kaneko K,Ito A,Wada T,Ishigami S -I
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Characterization of hydrophobic bonded silicon wafers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-01
2. Improvement of Pin Photodiodes on the Soi Layer by Rapid Thermal Annealing;MRS Proceedings;1995