A method to monitor the quality of ultra-thin nitride for trench DRAM with a buried strap structure
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Published:2006-11-30
Issue:2
Volume:22
Page:49-53
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ISSN:0268-1242
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Container-title:Semiconductor Science and Technology
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language:
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Short-container-title:Semicond. Sci. Technol.
Author:
Wu Yung-Hsien,Wang Chun-Yao,Chang Ian,Kao Chien-Kang,Kuo Chia-Ming,Ku Alex
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials