Formation of porous silicon on a non-conductive substrate and its use as a sacrificial layer-Reference-Cited by-同舟云学术

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Formation of porous silicon on a non-conductive substrate and its use as a sacrificial layer

Published:2005-11-15 Issue:12 Volume:20 Page:1217-1222
ISSN:0268-1242
Container-title:Semiconductor Science and Technology
language:
Short-container-title:Semicond. Sci. Technol.

Author:

Andrushin S Ya,Balagurov L A,Liberova G V,Loginov B A,Petrova E A,Sapelkin A,Unal B,Yarkin D G

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Electrolytic Shaping of Germanium and Silicon

2. Micromachining applications of porous silicon

3. Efficient visible electroluminescence from highly porous silicon under cathodic bias

4. Identification of Water Molecules in Low Humidity and Possibility of Quantitative Gas Analysis using Porous Silicon Gas Sensor

5. Permeated porous silicon for hydrocarbon sensor fabrication

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Macroporous silicon formation by electrochemical anodization of n-type silicon without illumination;Journal of Applied Physics;2018-09-07

2. Microstructure characterization and NO2-sensing properties of porous silicon with intermediate pore size;Applied Surface Science;2013-03

3. Electroless porous silicon formation applied to fabrication of boron–silica–glass cantilevers;Journal of Micromechanics and Microengineering;2009-12-15

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