A physical model for silicon anisotropic chemical etching
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Fabrication of novel three-dimensional microstructures by the anisotropic etching of
2. Computer simulation of anisotropic crystal etching
3. Emergent faces in crystal etching
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