Room-temperature selective growth of dielectric films by liquid-phase deposition
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0268-1242/9/i=6/a=015/pdf
Reference11 articles.
1. Ozone/organic-source APCVD for conformai doped oxide films
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