Point spread function and coherent line response in optical systems with non-uniform transmission pupils: application to photolithography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Reference29 articles.
1. Use of Annular Apertures to Increase Focal Depth
2. Influence of Non-uniform Amplitude on PSF
3. Effect of aberrations and apodization on the performance of coherent optical systems I The amplitude impulse response
4. A Study of the Possibility of Image Optimization by Apodization Filters in Optical Systems with Residual Aberrations
5. Reappraisal of arrays of concentric annuli as superresolving filters
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Test images of a sector star versus radial and axial merit functions;SPIE Proceedings;2008-09-19
2. The assessment of phase only filters in imaging systems by the classical optical merit functions;Optical and Digital Image Processing;2008-04-25
3. Programmable axial apodizing and hyperresolving amplitude filters with a liquid-crystal spatial light modulator;Optics Letters;1999-05-01
4. Influence of nonuniform pupils in imaging periodical structures by photolithographic systems;Optical Engineering;1998-04-01
5. High focal depth imaging of small structures;Microelectronic Engineering;1997-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3