Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution-Reference-Cited by-同舟云学术

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Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution

Published:2015-07-31 Issue:8 Volume:17 Page:085608
ISSN:2040-8978
Container-title:Journal of Optics
language:
Short-container-title:J. Opt.

Author:

Lee Yen-Min,Chen Szu-Hung,Hsu Chen-Pin,Chiou Pei-Chuen,Tsai Kuen-Yu,Chung Tien-Tung,Tsai Cheng-Han,Liu Zhan-Yu,Li Jia-Han

Funder

Ministry of Science and Technology of Taiwan

Publisher

IOP Publishing

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/2040-8986/17/i=8/a=085608/pdf

Reference29 articles.

1. Actinic extreme ultraviolet mask inspection beyond 0.25numericalaperture

2. Microscopy of extreme ultraviolet lithography masks with 132 nm tabletop laser illumination

3. Soft X-ray Microscope Constructed with 130-nm Spatial Resolution Using a High Harmonic X-ray Source

4. Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light

5. Soft X-Rays and Extreme Ultraviolet Radiation

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultrathin Fresnel lens based on plasmene nanosheets;Materials Today;2019-03

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