Structural characteristics of Al2O3thin films prepared by spray pyrolysis
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Reference14 articles.
1. High-performance polycrystalline SiGe thin-film transistors using Al2O3 gate insulators
2. A review of the present state of art in hard coatings grown from the vapor phase
3. Radiation resistance of Al2O3MOS devices
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5. Chemical vapour deposition of κ-Al2O3
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