Enhancement of the reflectivity of soft-x-ray Co/C multilayers at grazing incidence by thermal treatment
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Reference34 articles.
1. Fabrication of high‐reflectance Mo–Si multilayer mirrors by planar‐magnetron sputtering
2. Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet
3. Heat resistance of Mo/Si, MoSi2/Si, and Mo5Si3/Si multilayer soft x‐ray mirrors
4. Stability of multilayers for synchrotron optics
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