The effect of thermal annealing on crystallization in a-Si:H/SiO2multilayers by using layer by layer plasma oxidation
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/15/i=34/a=309/pdf
Reference15 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
2. Epitaxy‐ready Si/SiO2 Bragg reflectors by multiple separation‐by‐implanted‐oxygen
3. Photoluminescence from nanocrystalline silicon in Si/SiO2 superlattices
4. Luminescence studies of a Si/SiO2 superlattice
5. Visible photoluminescence in crystallized amorphous Si:H/SiNx:H multiquantum‐well structures
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