Effects of boron addition on a-Si90Ge10:H films obtained by low frequency plasma enhanced chemical vapour deposition
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/17/i=25/a=023/pdf
Reference18 articles.
1. High performance glow discharge a-Si1−xGex:H of large x
2. Structural, optical, and electrical properties of hydrogenated amorphous silicon germanium alloys
3. Structural, electrical, and optical properties ofa-Si1−xGex:H and an inferred electronic band structure
4. The Properties of a-SiC:H and a-SiGe:H Films Deposited by 55 kHz PECVD
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication process of a microstructures based on hydrogenated amorphous SiGe films for applications in MEMS devices;Journal of Mechanical Science and Technology;2015-04
2. Fabrication of a-SiGeC:H solar cells using monomethyl germane by suppressing carbon incorporation for narrowing optical bandgap;Solar Energy Materials and Solar Cells;2011-03
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