Advanced photoresist technologies for microsystems-Reference-Cited by-同舟云学术

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Advanced photoresist technologies for microsystems

Published:2001-07-01 Issue:4 Volume:11 Page:353-358
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

O'Brien J,Hughes P J,Brunet M,O'Neill B,Alderman J,Lane B,O'Riordan A,O'Driscoll C

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. High aspect ratio UV photolithography for electroplated structures

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