Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Deep reactive ion etching;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2015
3. Deep Reactive Ion Etching;Handbook of Silicon Based MEMS Materials and Technologies;2010